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发明名称
SEMICONDUCTOR PROCESSING SILICA SOOT ABRASIVE SLURRY METHOD FOR INTEGRATED CIRCUIT MICROELECTRONICS
摘要
申请公布号
EP1238417(A1)
申请公布日期
2002.09.11
申请号
EP20000982198
申请日期
2000.11.22
申请人
CORNING INCORPORATED
发明人
DARCANGELO, CHARLES, M.;SABIA, ROBERT;SELL, ROBERT, D.;STEVENS, HARRIE, J.;UKRAINCZYK, LJERKA
分类号
B24B37/04;B24B57/02;C09G1/02;C09K3/14;H01L21/304;H01L21/321;(IPC1-7):H01L21/302;H01L21/461
主分类号
B24B37/04
代理机构
代理人
主权项
地址
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