| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe card wherein corrosion does not occur on a through-hole in the probe card even when it has been used for a long time, it is superior in a mechanical strength at a normal or high temperature, defective contact to a probe, warpage or deformation does not occur even in a high temperature, and temperature matching is fast. SOLUTION: There is disclosed the probe card which is used for inspection of an integrated circuit formed on a semiconductor wafer. The probe card consists of a ceramic substrate made of non-oxide ceramic. The ceramic substrate has a leakage quantity not greater than 10<-7> Pa/m<3> /sec (He) measured by a helium leak detector.
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