| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for detecting tetramethylammonium hydroxide(TMAH) included in a liquid whereby the TMAH can be detected in a short time accurately and effects of foreign matter can be eliminated. SOLUTION: The method for detecting the TMAH included in the liquid includes a heating and decomposing process of heating thereby decomposing the TMAH, and a gas-phase detecting process of detecting trimethylamine as a byproduct of the heating and decomposition in a gas phase. The apparatus for detecting the TMAH included in the liquid has a heating and decomposing means for heating thereby decomposing the TMAH, and a gas-phase detecting means for detecting trimetylamine as a byproduct of the heating and decomposition in a gas phase.
|
