发明名称 |
Lens assembly for electron beam column |
摘要 |
A lens assembly for use with an electron beam optical system operating in a vacuum. The lens assembly includes a housing forming a sealed enclosure and at least one lens disposed within the housing. The housing includes a port for connection to a vacuum source for creating a vacuum in the sealed enclosure. A method of creating a vacuum within the lens assembly is also disclosed. <IMAGE> |
申请公布号 |
EP1239509(A1) |
申请公布日期 |
2002.09.11 |
申请号 |
EP20020004970 |
申请日期 |
2002.03.05 |
申请人 |
NIKON CORPORATION |
发明人 |
SOGARD, MICHAEL |
分类号 |
G03F7/20;H01J37/141;H01J37/147;H01J37/18;H01J37/301;H01L21/027 |
主分类号 |
G03F7/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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