| 摘要 |
A pellicle comprising a pellicle film, a pellicle frame supporting the pellicle film, and an adhesive resin layer provided on the surface of the pellicle frame on the side opposite to the surface supporting the pellicle film, wherein the adhesive resin layer is formed of a combination of a hard resin layer and a soft resin layer. The pellicle can be mounted on the mask and can be removed from the mask without giving damage to the mask, and does not spoil the flatness of the mask irrespective of when the mask surface is maintained in either the horizontal direction or the vertical direction. <IMAGE> |
