| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem that, in the process of sticking two substrates under keeping a prescribed gap, a positional shift occurs after sticking, because a temperature difference between the substrates occurs at the time of sticking even if they are correctly adjusted at the room temperature. SOLUTION: The method is that the upper substrate 2 and the lower substrate 1 are fitted mutually, and a positioning pins 6, 7 are fixed by considering heat expansion at the time of sticking, then they are put into a sticking furnace as they are. The temperature of this furnace is raised to a prescribed temperature to stick them, then lowered after sticking, and the stuck substrate is cooled simultaneously.
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