发明名称 Method for fabricating cladding layer in top conductor
摘要 <p>A method for cladding two or three sides of a top conductor 20 for a magnetic memory device 10 in ferromagnetic material 58 includes forming a trench 46 with side walls 50 in a coating layer 40 above the memory device. A first ferromagnetic material is deposited along the side walls of the trench. Any ferromagnetic material in a bottom of the trench 54 can be removed. A conductor material 62 is deposited in the trench over the memory device. A second ferromagnetic material 74 is deposited over the conductor material in the trench to form a cladding of the ferromagnetic material around three sides of the conductor. &lt;IMAGE&gt;</p>
申请公布号 EP1239489(A1) 申请公布日期 2002.09.11
申请号 EP20020251667 申请日期 2002.03.08
申请人 HEWLETT-PACKARD COMPANY 发明人 NICKEL, JANICE H.;ANTHONY, THOMAS C.
分类号 G11C11/14;G11C11/15;G11C11/16;H01L21/8246;H01L27/105;H01L27/22;H01L43/08;(IPC1-7):G11C11/15;H01L21/824 主分类号 G11C11/14
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