| 摘要 |
At least one - preferrably multiple - measurement sensors (1) and a vehicle (2) are combined to provide a mobile analysis of a chemical fluid used in a semiconductor fabrication facility. Peripheral equipment such as sets of plug connectors (3a, 3b) for transferring the chemical fluid from said processing tool (40), an electronic control system (5) with, e.g., a Laptop, a conduit system (8) with a pump system(9), and security means such as leakage detecting sensors (1a) and an automatic cleaning system are also provided on the vehicle (2). The measurement arrangement reduces bottleneck situations when qualifying processing tools (40) during fast ramp-up phases of semiconductor manufacturing facilities. The construction is based on PGVs or AGVs and allows a fast operation directly at the location of a processing tool (40). With the exception of the chemical connection, power supply or operator control, the measurement arrangement can operate fully autonomous. <IMAGE> |
