发明名称 |
Control of the illumination distribution in the exit pupil of an illumination system |
摘要 |
The system produces predetermined light distribution in the exit pupil of the illumination system between light source and secondary light source or at the location of the secondary light sources. Number and/or form of the raster elements illuminated by the source producing the light distribution are so selected that predetermined uniformity of the field lighting in the object or reticular plane is achieved. |
申请公布号 |
EP1239330(A1) |
申请公布日期 |
2002.09.11 |
申请号 |
EP20020008198 |
申请日期 |
2000.07.26 |
申请人 |
CARL ZEISS |
发明人 |
SCHULTZ, JOERG |
分类号 |
G02B17/00;G02B17/06;G02B19/00;G02B27/00;G02B27/09;G03F7/20 |
主分类号 |
G02B17/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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