| 摘要 |
PURPOSE: A particle-optical lens arrangement and a method employing such a lens arrangement are provided, which reduces aberration as to particle beam prolonged out of an optical axis component of the lens arrangement. CONSTITUTION: A lens arrangement for the particle-optical imaging of an object(23), to be imaged and positionable in an object area(27), into an image area(31), comprising: a first focusing lens device(55) for providing a field having a focusing effect on the imaging particles for imaging the object(23) from the object area(27) into an intermediate image area(59), a second focusing lens device(57) for providing a further field having a focusing effect on the imaging particles for imaging the object(23), which has been imaged into the intermediate image area(59), into the image area(31), and a deflection lens device(63) for providing a field having a deflecting effect on the imaging particles in a region of the intermediate image area(59).
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