| 摘要 |
PROBLEM TO BE SOLVED: To provide a method wherein a probe card, in which many probes having a small contact area with an electrode pad are arranged at narrow pitches is manufactured with satisfactory efficiency. SOLUTION: Grooves in the required number of portions of probes are formed on the surface of a substrate composed of silicon (process S100). A conductive material is formed in the grooves, and the probes are formed by using the grooves as a mold (process S120). After that, the substrate is removed, in such a way that parts up to prescribed lengths of the probes are exposed, and a probe base composed of the remaining substrate is formed (process S140). Thereby, a plurality of probes can be formed collectively on the probe base, and the probe card can be formed with satisfactory efficiency, even if the number of probes is increased.
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