| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe card in which a fine pattern can be formed, in which a completed circuit is flat so as to be capable of preventing the generation of noise due to skin effects and whose adhesion property to a conductor pattern on the surface is sufficiently maintained. SOLUTION: The probe card is used to inspect an integrated circuit formed on a semiconductor wafer. The probe card is composed of a ceramic substrate made of a nonoxidative ceramic, and the surface roughness Ra, based on JIS B 0601 of the ceramic substrate, is 0.001μm<Ra<10μm.
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