| 摘要 |
PROBLEM TO BE SOLVED: To reduce a set of device composed of a driver device for controlling an driving the motors and a software for controlling and driving the motors as well as the number of motors by making the number of motors reducible, and to solve such an important problems for producing the apparatus, as to make the apparatus simple, to reduce the manufacture cost and to make the software simple. SOLUTION: The apparatus employs a 2θ-driving mechanism 40 that allows an X-ray tube XT and an X-ray detector SC to move in a circular arc, the center of which is a measurement point on the surface of sample, so as to have identical angle to the diffraction plane normal N in the opposite direction to each other in order to measure the diffracting ray using theψ-constant method. The 2θ-driving mechanism 40 is driven using a single 2θ-motor 41.
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