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发明名称
摘要
申请公布号	FR2106413(A1)	申请公布日期	1972.05.05
申请号	FR19710031855	申请日期	1971.09.03
申请人	SIEMENS AG	发明人
分类号	H01L21/22;H01L21/74;H01L21/82;H01L27/00;(IPC1-7):H01L7/00;H01L9/00	主分类号	H01L21/22
代理机构		代理人
主权项
地址

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