| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method for an ink jet head without generating clogging of a passage by an adhesive. SOLUTION: A Si film 51 is formed on a 42-alloy cavity plate 10 with a sputtering method or the like. A piezoelectric actuator 20 is superposed on the cavity plate 10 in which the Si film 51 is formed and a SiO2 film 50 is formed by a sol-gel method. The cavity plate 10 is set an anode, the piezoelectric actuator 20 is set a cathode, a predetermined voltage is applied thereto, and the Si film 51 and the SiO2 film are joined by an anode joining. Thus, the piezoelectric actuator 20 and the cavity plate 10 are joined without using the adhesive.
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