| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus for manufacturing a multilayer film of diamond-like carbon, which can form a thin film of a good quality with a nitrogen passivation function. SOLUTION: The apparatus for manufacturing the multilayer film of diamond- like carbon with the nitrogen passivation function, arranges an exhaust valve 1 and a valve 2 for introducing reaction chamber gas immediately in front of a reaction chamber 3, has a computer E for controlling the above both valves 1 and 2 by a predetermined protocol, and connects the exhaust valve 1 to exhaust ducts 4 and 6 which are connected to the above reaction chamber 3 or an exhaust pump 7, and has an introducing line for directly introducing inert gas into the above reaction chamber 3 through a valve 20.
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