发明名称 POLISHING MATERIAL FOR DRY BLAST PROCESSING
摘要 PROBLEM TO BE SOLVED: To provide a polishing material which can effectively prevent troubles caused by water such as the coagulation or agglomeration of the polishing material, or the adhesion of the polishing material to an article to be polished, and can achieve high polishing efficiency and high processing accuracy. SOLUTION: The polishing material is characterized by treating the surfaces of spherical inorganic particles with a water repellency-imparting substance.
申请公布号 JP2002256255(A) 申请公布日期 2002.09.11
申请号 JP20010365837 申请日期 2001.11.30
申请人 MARUO CALCIUM CO LTD 发明人 SAKAI TAKANOBU;MATSUO KATSUHIKO
分类号 B24C11/00;B24C1/04;C09K3/14;H01J9/02;(IPC1-7):C09K3/14 主分类号 B24C11/00
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