发明名称 Piezoelectric/electrostrictive device and method of manufacturing same
摘要 A piezoelectric/electrostrictive device includes a pair of mutually opposing thin plate sections, a movable section, and a fixing section for supporting the thin plate sections and the movable section. Piezoelectric/electrostrictive elements are arranged on at least one thin plate section of the pair of thin plate sections. A hole is formed by both inner walls of the pair of thin plate sections, an inner wall of the movable section, and an inner wall of the fixing section. The piezoelectric/electrostrictive device further includes at least one beam section extending from the inner wall of the movable section to the inner wall of the fixing section.
申请公布号 US6448693(B1) 申请公布日期 2002.09.10
申请号 US20000669441 申请日期 2000.09.25
申请人 NGK INSULATORS, LTD. 发明人 TAKEUCHI YUKIHISA;NANATAKI TSUTOMU;KIMURA KOJI
分类号 H01L41/08;H01L41/083;H01L41/09;H01L41/22;H01L41/24;H02N2/00;(IPC1-7):H01L41/08 主分类号 H01L41/08
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