发明名称 |
Electrostrictive and piezoelectric thin film assemblies and method of fabrication therefor |
摘要 |
An electrostatic self-assembly method of fabricating electrostrictive and piezoelectric thin film assemblies not only provides a thinner film than is attainable by conventional methods, but provides excellent molecular-level uniformity and precise structural control, and thus large, effective piezoelectric coefficients. The method produces a thin film assembly including (a) a substrate, and (b) a film having one or a plurality of layers disposed upon the substrate, wherein at least one of the layers includes a dipolar material, and this layer of dipolar material has a uniform thickness of at most 500 nm.
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申请公布号 |
US6447887(B1) |
申请公布日期 |
2002.09.10 |
申请号 |
US20000559599 |
申请日期 |
2000.04.28 |
申请人 |
VIRGINIA TECH INTELLECTUAL PROPERTIES, INC. |
发明人 |
CLAUS RICHARD O.;ZENG TINGYING;LIU YANJING |
分类号 |
H01L41/22;H01L41/26;(IPC1-7):H01L41/00;B05D1/04 |
主分类号 |
H01L41/22 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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