| 摘要 |
A substrate for mounting an optical component includes a first groove formed in a surface of a substrate, a second groove formed in the surface of the substrate, the second groove having a depth greater than the first groove. In the present invention, the first groove and the second groove are related to each other by the following equation,where D denotes a depth of the first groove, theta denotes an angle between a horizontal plane and a slanted surface of the first groove (0°<theta<90°), R=F/E (E denotes an etching rate of a slanted surface of the first groove, F denotes an etching rate of a bottom surface of the groove, C denotes a top opening width of the groove. The first and second grooves are formed by forming a protection film on an entire top surface of the substrate, forming pattern holes corresponding to the first and second grooves in the protection film by a single mask having holes corresponding to the first and second grooves, forming a protection seal on a pattern hold corresponding to one of the first and second grooves, applying anisotropic etching to the substrate through the not-sealed pattern hole to thereby form the other of the first and second grooves, removing the protection seal, forming another protection seal on the groove formed by anisotropic etching, applying anisotropic etching to the substrate through the seal-removed pattern hole to thereby form the remaining one of the first and second grooves; and removing the protection film and the another protection seal from the substrate.
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