发明名称 Method of depositing multilayer thin films
摘要 This invention is directed to methods for depositing multilayered thin films onto substrates, for example in making thin film magnetic heads. In accordance with the invention a first film, such as Cr, is deposited onto the substrate at a first pressure and a second layer, such as CoCrPt is deposited at a second pressure.
申请公布号 US6447839(B1) 申请公布日期 2002.09.10
申请号 US20000603408 申请日期 2000.06.26
申请人 VEECO INSTRUMENTS, INC. 发明人 HEGDE HARI;DEVASAHAYAM ADRIAN;WANG JINSONG
分类号 G11B5/31;G11B5/39;H01F41/30;(IPC1-7):B05D5/12;G11B5/127 主分类号 G11B5/31
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