ELECTROSTATICALLY ACTUATED MICRO-ELECTROMECHANICAL SYSTEM(MEMS) DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an electrostatically actuated micro-electromechanical system(MEMS) device. SOLUTION: This invention discloses a micro-electromechanical system(MEMS) actuator device. The MEMS actuator device is provided with an operating element rotatably connected to a support structure through twist members. The twist members give recovery force to maintain the operating element flat to a surface of a lower side substrate. Electrodes are formed on a surface of the substrate. The electrodes are adapted to gain electrical potential. When some of the electrodes gain electrical potential, static electricity to get the operating element out of the plane and rotate the same is generated. The electrodes consist of three components. At least a part of the two components is arranged within an inclined area of the operating element. The third component is arranged outside of the inclined area of the operating element. The inclined area is defined as a surface area when the operating element is projected on the lower side substrate.