发明名称 |
Ion scattering spectrometer |
摘要 |
From an ion source and accelerator an ion beam is generated, this ion beam is let go through a circular hole bored in the center of a detector and orifices to irradiate a sample in a sample chamber. The detector detects particles scattered from the sample and arrived at the detector through the orifices. With exhaust units and orifices, the region surrounding the detector is exhausted to be a prescribed degree of vacuum of higher vacuum than the inside of the sample chamber.
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申请公布号 |
US6448554(B1) |
申请公布日期 |
2002.09.10 |
申请号 |
US19990321853 |
申请日期 |
1999.05.28 |
申请人 |
THE INSTITUTE OF PHYSICAL AND CHEMICAL RESEARCH (RIKEN) |
发明人 |
AONO MASAKAZU;KOBAYASHI TAKANE |
分类号 |
H01J37/18;H01J37/252;H01J49/40;(IPC1-7):H01J37/252;H01J49/44 |
主分类号 |
H01J37/18 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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