| 摘要 |
Disclosed is a drying nozzle for realizing a high-efficiency drying device capable of drying an object to be processed to a sufficient degree. The drying nozzle includes a drying gas supply portion having an air supply tube for supplying air for drying a substrate whose surface is wet with a liquid by being sprayed against the surface of the substrate, and a gas/liquid mixture discharge portion which is spaced apart from the surface of the substrate by a predetermined distance to thereby make the thickness of the liquid adhering to the surface of the substrate prior to the drying constant and which has a porous material having a large number of through-holes for discharging the air/liquid mixture consisting of air and the liquid,from the surface of the substrate, the drying gas supply portion and the gas/liquid mixture discharge portion being arranged along the surface of the object so as to be adjacent to each other.
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