System for measuring intraocular pressure of an eye and a MEM sensor for use therewith

摘要

A tonometer sensor for disposition in proximity to a portion of a surface of eye comprises a substrate including a contact surface for making contact with the surface portion of the eye. The contact surface includes an outer non-compliant region and in inner compliant region fabricated as an impedance element that varies in impedance as the inner region changes shape. A first region of material is responsive to a non-invasive external force to press the contact surface against the surface portion of the eye and cause the compliant region to change shape in proportion to an intraocular pressure of the eye. A second region of conductive material is electrically coupled to the impedance element of the compliant region and is responsive to an external signal for energizing the impedance element so that the intraocular pressure may be determined.