| 摘要 |
In electron microscopy, resolution is improved by using an atom or atom-array focuser, with the atom or atom array serving as an electrostatic lens at a focal plane of an electron beam probe having a beam size less than about 0.2 nm at the focal plane. An electrostatic lens can be included in ultra-high resolution microscopes wherein (i) in a linear atom array, the atoms are in alignment with the electron path, (ii) the distance between a sample and the electrostatic lens is adjustable, (iii) a two-dimensional focuser is used, (iv) a sample is at Fourier image distance from a two-dimensionally periodic focuser, (v) a two-dimensional detector or detector array is used, and/or (vi) the electron beam is scanned at the focal plane.
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