X-RAY MEASURING INSTRUMENT AND X-RAY MEASURING METHOD

摘要

PROBLEM TO BE SOLVED: To measure the partial region of a sample without using a collimator or without accurately arranging a collimator at a specific position close to the sample even if the collimator is used. SOLUTION: The X-ray measuring instrument has an X-ray source for generating X-rays R0 applied to the sample S and an X-ray detector for detecting the X-rays R1 diffracted by the sample S and also has a mask 9 for covering the X-ray irradiation surface of the sample S. The mask 9 is formed from a single crystal substance and has an aperture 15 permitting X-ray R0 to pass. The partial region S0 of the sample S controlled by the aperture 15 can be set to a measuring object.