PROXIMITY GAP CONTROL METHOD, PROXIMITY GAP CONTROLLER AND PROXIMITY ALIGNER

摘要

PROBLEM TO BE SOLVED: To set a proximity gap in a short time. SOLUTION: A chuck is moved between a transfer position where a substrate is transferred and an exposure position where the substrate is exposed. While the chuck is moved from the transfer position to the exposure position, a gap detection means detects space between the substrate fixed on the chuck and a mask at the exposure position. While the chuck is moved from the transfer position to the exposure position, a gap setting means controls the space between the substrate and the mask by moving the chuck up and down based on the detected result by the gap detection means.