SUBSTRATE CARRYING DEVICE, SUBSTRATE PROCESSING DEVICE USING THE SAME AND SUBSTRATE PROCESSING METHOD

摘要

PROBLEM TO BE SOLVED: To shorten a carrying tact time by optimizing the movement of an indexer robot. SOLUTION: A substrate process unit has a substrate carrying-in port PI where an unprocessed substrate is carried in and a substrate carrying-out port PO where an unprocessed substrate is carried out. Relating to the substrate carrying-in port PI and the substrate carrying-out port PO, a substrate carrying-in mechanism 205 and a substrate carrying-out mechanism 206 are provided separately. The indexer robot R carries in/out the substrate for the substrate carrying-in mechanism 205 and the substrate carrying-out mechanism 206. The substrate carrying-in mechanism 205 and the substrate carrying-out mechanism 206 are controlled by an indexer controller 202 as well as the indexer robot R. The indexer controller 202 actuates the substrate carrying-in mechanism 205 and the substrate carrying-out mechanism 206 responding to a request for substrate carrying-in and a request for substrate carrying-out given from a substrate process controller 201 via a communication line 203, and also controls the indexer robot R independently of these requests.