ANTI-REFLECTIVE COATING MATERIAL, SEMICONDUCTOR PRODUCT WITH AN ARC LAYER AND METHODS

摘要

The invention refers to an anti-reflective coating (ARC) layer (2) covering a semiconductor substrate, the ARC layer being made of a matrix substance (3) and of nanocrystalline particles (4) of another material than the matrix substance. According to the invention the nanocrystalline particles (4) are absorbing light via the quantum size effect. Thereby a new kind of ARC layer, in particular absorbing ARC layer, is provided.