ELECTRON BEAM TREATMENT DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an electron beam treatment device that can exactly measure only the quantity of electron beams emitted from electron beam tubes. SOLUTION: In an electron beam treatment device which has electron beam quantity detection components 2 that detect the quantity of the electron beams emitted from the electron beam tubes 1 with the electron emission windows 11 outside them, connection lines 3 which transmit detection signals detected by the electron beam quantity detection components 2 are insulated and coated so as not to be affected at least by the electron beams and the plasma generated by them.