| 摘要 |
PROBLEM TO BE SOLVED: To provide a three-dimensional surface shape measuring device and a three- dimensional surface shape measuring method, capable of improving measurement accuracy by detecting age-based displacement during measurement. SOLUTION: In this three-dimensional surface shape measurement, a measuring point displacement meter for detecting the distance from a measuring point, on the surface of the measuring object and the measuring object are relatively moved, to thereby relatively scan the surface of the measuring object, and of the change of the distance from the measuring point on a scanning locus is detected by the measuring point displacement meter, to thereby measure the surface shape of the measuring object. The measurement is characterized by making rough measurement, after setting approximate measuring points to the number of M (M is an integer not less than two), and detailed measurement, after setting detailed measuring points to the number of N (N is an integer, M<N) including the number of M, and; when the m-th approximate measuring point (m is an integer, 1<=m×M) among the number of M is the same point as the n-th detailed measuring point (n is an integer such that 1<=n<=N) among the number of N, determining the difference between measured values at the points as age-based displacement at the n-th detailed measuring point.
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