AUTOMATED WAFER HANDLING WITH GRAPHIC USER INTERFACE

摘要

A graphic user interface controls a wafer transfer system (33) to transfer unprocessed wafers (25) from a wafer cassette (49) to a wafer carrier (27) and processed wafers (25) from a wafer carrier (27) to a wafer cassette (49). The invention includes a processor (65), a display device (53) and data entry means (55, 57) co-operating to provide a graphical user interface for use in performing automatic wafer transfer.