发明名称 METHOD AND APPARATUS FOR CONTROLLING A TOOL USING A BASELINE CONTROL SCRIPT
摘要 <p>A method for controlling a manufacturing system (100) includes processing workpieces in a plurality of tools (120, 125); initiating a baseline control script (152, 154) for a selected tool (120, 125) of the plurality of tools (120, 125); providing context information for the baseline control script (152, 154); determining a tool type based on the context information; selecting a control routine for the selected tool (120, 125) based on the tool type; and executing the control routine to generate a control action for the selected tool (120, 125). A manufacturing system (100) includes a plurality of tools (120, 125) adapted to process workpieces, a control execution manager (150), and a control executor (220). The control execution manager (150) is adapted to initiate a baseline control script (152, 154) for a selected tool (120, 125) of the plurality of tools (120, 125) and provide context information for the baseline control script (152, 154). The control executor (220) is adapted to execute the baseline control script (152, 154), determine a tool type based on the context information, select a control routine for the selected tool (120, 125) based on the tool type, and execute the control routine to generate a control action for the selected tool (120, 125).</p>
申请公布号 WO2002069063(A2) 申请公布日期 2002.09.06
申请号 US2001050178 申请日期 2001.10.22
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