VAPORIZER

摘要

A vaporizer (64E) is provided for delivering vapor streams such as high purity streams to a processing destination, such as a wafer processing chamber. The vaporizer includes a heated base having one or more seamless slots (18) formed in one of its faces for carrying a liquid which is vaporized by heat from the heated plate. In one embodiment, the vaporizer includes an atomizer (64) for atomizing the liquid prior to vaporization to reduce the temperature of vaporization. In one embodiment, the vaporizer includes a heat exhanger (94F) having cross-slots (108) intersecting a plurality of seamless slots (18F) to reduce unvaporized liquid exiting the vaporizer.