| 摘要 |
PROBLEM TO BE SOLVED: To provide a control valve which is superior to responsiveness and is simple in mechanism and for which a high precision control can be performed and furthermore, variations in the line pressure will not turn into noise. SOLUTION: The valve is constituted so as to dispose to enable valve bodies 51, 52 connected with each other by a connecting rod 57 in a branch passage 43, to shift and downwardly impress the force of a first diaphragm 65 via a pressure plate 63 and at the same time, shut off the line pressure to the first diaphragm 65 by a third diaphragm 67, and upwardly impress the pressure of a second diaphragm 66 via a second pressure plate 64, and at the same time, shut off the line pressure to the second diaphragm 66 by a forth diaphragm 68, and adjust the gap between a pair of valve bodies 51, 52 and valve seats 45, 46 on both sides of a branch passage 43, in response to signal pressure without being influenced by the line pressure, and control flow divided ratio of fluid split to outlet ports 41, 42.
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