| 摘要 |
PROBLEM TO BE SOLVED: To attain the precise control of energy quantity by adjusting the applied voltage even if there is deterioration due to time change occurring in the relation between the applied voltage and the oscillation energy quantity at an energy generating source. SOLUTION: A device for transferring the pattern of the first substance onto the second substance by using pulse energy is provided with a means of storing relational information between applied voltage, in the case of the oscillation of an energy source and the energy quantity of the pulse energy to be oscillated from the energy source; a means for measuring the energy quantity of the pulse energy to be oscillated and a means for properly updating information, according to the secular change of the information by using the applied voltage to an energy source in the middle of transfer; and the energy quantity measured in the middle of transfer, in order to decide the applied voltage to the energy source, corresponding to the energy quantity of pulse energy with which the second substance has to be irradiated.
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