| 摘要 |
PROBLEM TO BE SOLVED: To provide a stamper having high wear resistance and durability and formed with low defect without damaging a fine groove formed by a resist mask method, when the stamper is formed from a glass master disk wherein a fine pattern is formed by the resist mask method using water soluble resin. SOLUTION: A manufacturing method for the stamper has a stage for performing exposure and etching of a photoresist layer to form an information fine pattern at a lower layer, a stage for forming a chromium film by chromium sputtering using an argon ion after the photoresist layer is removed and forming a nickel conductive film by nickel sputtering using an argon ion or by nonelectrolytic nickel plating, a stage for performing nickel electroforming to laminate a nickel layer having a fine pattern having ruggedness reverse to the information fine pattern and a stage for peeling the nickel layer together with the chromium film from the glass master disk to form the stamper.
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