GLASS SUBSTRATE CONVEYANCE DEVICE AND ALIGNER

摘要

PROBLEM TO BE SOLVED: To shorten the time required for transferring a substrate and reduce unevenness in exposure. SOLUTION: A chuck moves between an exposure position for exposing substrates 1a, 1b and a transfer position for transferring the substrate. A transfer means transfers the substrate to the chuck in a transfer position. A movable member 12 arranged in the chuck opens a space into which a transfer means 40 or 50 is inserted, in the transfer position, and closes the space into which the transfer means 40 or 50 is inserted, in the exposure position.