| 摘要 |
PROBLEM TO BE SOLVED: To reduce the risk of making an human error by changing the recipe through the use of a file form easy to use for a user, so as to comparatively simplify changing operation to reduce the man-hours. SOLUTION: In the file form of a processing recipe in a CVD device, a film- creating time is tabled in the batch file 17 of a binary file which is an execution form and the second file 18 of the other text form, and the batch file 17 and the second file 18 are linked with each other via a file form conversion means 19. When the second file 18 is changed, the batch file 17 linked via the file form (text/binary) means 19 is also changed automatically.
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