| 摘要 |
PROBLEM TO BE SOLVED: To provide a thin-film capacitor, which varies less in electrostatic capacity due to the influence of processing accuracy, is readily decreased in size, thickness, and weight, and compensates for temperature by using a dielectric material that has low permittivity and is capable of controlling the temperature dependence of electrostatic capacity. SOLUTION: A temperature compensating thin-film capacitor 1 has such a structure, with a first dielectric thin film 5 having permittivity of 4.0 or lower and a coefficient of linear thermal expansion of 50 ppm/ deg.C or higher and a second dielectric film 4 whose absolute value of a temperature coefficient of capacitance is 50 ppm/ deg.C or lower are interposed between a pair of electrodes.
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