| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and an equipment for carrying out high sensitivity analysis quickly using a relatively inexpensive easy-to-handle gas chromatograph so that analysis of extremely low concentration hydrogen sulfide in a high purity sample gas (especially, high purity gas such as arsine or phosphine) can be carried out easily every day. SOLUTION: The method and equipment for analyzing hydrogen sulfide contained in a high purity sample gas (1) at an extremely low concentration using gas chromatography comprises a precolumn (8) filled with an adsorbent exhibiting higher adsorption to hydrogen sulfide than to the main components in the sample gas (1), means (8a) for cooling the precolumn (8) and means (8b) for heating the precolumn (8), main column (10) of the gas chromatograph disposed in the downstream of the precolumn (8), and a detector (11) disposed in the downstream of the main column (10).
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