发明名称 ELECTRODE DEVICE
摘要 PROBLEM TO BE SOLVED: To provide an electrode device which stably generates plasma near the atmospheric pressure and decomposes organic gas. SOLUTION: As one embodiment of rotational floating multipole discharge device, an electrode 110 is constituted so as to bury screws 116 of 3ϕ concentrically at an interval of 4.5 mm into an insulator disk 114. The electrode 110 of such a constitution is disposed in an atmosphere of organic gas such as methane and ethylene near the atmospheric pressure, the electrode 110 is rotated at 2-10 rpm by a central shaft 112 and a voltage is applied to the two screws of the outer periphery via brushes 118. Then, discharge is generated between the screws of a path A-B which connects the two brushes 118 and the plasma is formed. The path through which the discharge is generated is changed at all times because the circular insulator is rotated.
申请公布号 JP2002249877(A) 申请公布日期 2002.09.06
申请号 JP20010049141 申请日期 2001.02.23
申请人 JAPAN SCIENCE & TECHNOLOGY CORP 发明人 NISHIDA YASUSHI;NAGASAWA TAKESHI;YUGAMI NOBORU;ITO HIROAKI
分类号 G21F9/02;B01J19/00;B01J19/08;C23C16/503;H05H1/24 主分类号 G21F9/02
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