| 摘要 |
<p>PROBLEM TO BE SOLVED: To take the statistics of the X-ray inspection results of an object to be inspected with respect to various items to effectively utilize them in the maintenance of a manufacturing line or the analysis of a cause at the time of detection of foreign matter. SOLUTION: A processing means 13 judges the presence of the foreign matter in the object W to be inspected on the basis of the X-ray transmission quantity detected by an X-ray detector 9 when the object W to be inspected is exposed to and irradiated with X-rays. A statistical processing part 16 sets the kind of the object to be inspected as a unit to successively store the respective detection values of the acquired items, for example, the number of products, the mixing number of foreign matters, a manufacturing period or the like set to an item setting part 18 in a memory part 14. At the time of alteration of the kind, statistic processing setting the kind of the object to be inspected, an inspection period, a date and a lot as units is carried out on the basis of the acquired items stored in the memory part 14 to automatically issue printing output from an external printing part 17. At this time, the printed acquired items are automatically eliminated from the memory part 14.</p> |
