| 摘要 |
PROBLEM TO BE SOLVED: To provide a moving table control method and its device, having a comparatively inexpensive moving mechanism of the moving table, capable of easily correcting movement error due to constitution, and to provide a three-dimensional surface shape measuring method and its device, capable of measuring the three-dimensional surface shape with high accuracy with a comparatively inexpensive constitution, by utilizing the control method and its device. SOLUTION: This control method has characteristics such that it three axes of three- dimensional orthogonal coordinates are an X-axis, a Y-axis and a Z-axis respectively are assumed as being virtual and a prescribed virtual plane parallel to both the X-axis and the Y-axis is defined as a virtual reference plane; the moving table is moved, so that a detection plane of the moving table having the detection plane is moved in approximate manner in the virtual reference plane; and that if a normal erected at a prescribed reference point on the virtual reference plane is defined as a reference normal and an arbitrary one point on the detection plane is defined as the detection point, the displacement in the Z-axis direction from the reference point, when the detection point becomes an intersection point with the reference normal by the movement of the moving table is detected as the movement displacement of the detection point.
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