| 摘要 |
PROBLEM TO BE SOLVED: To provide a scanner system which is inexpensively manufactured, mechanically sturdy, compact, and has an improved resolution. SOLUTION: The micro-opto-electro-mechanical laser scanner 40 is composed of a silicone substrate layer, a laser of embedded oxide layer, and an insulating body silicone substrate having a single silicon device layer. A first device layer part has a micro mirror 34 which is made of the device layer. A laser unit is connected with a second device layer part and a hinge 24 connects the first device layer part and the second device layer part. The hinge 24 is formed by a bimorph material and the bimorph material creates a specific stress in the hinge 24. The bimorph type hinge 24 moves the released micro mirror 34 from a horizontal plane to a position in which a laser beam 42 emitted from the laser unit is directly or indirectly reflected.
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