| 发明名称 |
NOVEL POLYMERS AND PHOTORESIST COMPOSITIONS COMPRISING SAME |
| 摘要 |
The invention includes polymers that contain a polymers of the invention contain one or more 1) carbonate units and/or 2) a lactone provided by a monomer having a ring oxygen adjacent to the monomer vinyl group. The invention also provides photoresists that contain such polymers, particularly for imaging at short wavelengths such as sub-200 nm. |
| 申请公布号 |
WO02069038(A2) |
申请公布日期 |
2002.09.06 |
| 申请号 |
WO2002US08153 |
申请日期 |
2002.02.25 |
| 申请人 |
SHIPLEY COMPANY, L.L.C. |
发明人 |
BARCLAY, GEORGE, G.;CAPORALE, STEFAN, J. |
| 分类号 |
C08F220/18;C08F234/02;G03F7/039;H01L21/027 |
主分类号 |
C08F220/18 |
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