CONFOCAL MICROSCOPE, OPTICAL HEIGHT MEASURING METHOD, AND AUTOMATIC FOCUSING METHOD

摘要

A confocal microscope, comprising a means for scanning a light from a light source passed through a confocal pattern on a specimen through an objective lens, a confocal optical system for focusing the light from the specimen passed through the confocal pattern through the objective lens on an photoelectric converting means to obtain a confocal image, and a variable restrictor disposed at an eye position on the objective lens or at a position conjugated with the eye position on the objective lens between the light source and the objective lens and allowing a sectioning effect to vary in optical axis direction.