| 摘要 |
PROBLEM TO BE SOLVED: To provide a high-sensitivity infrared detection element, using a bolometer layer, having a high resistance-temperature coefficient at room temperature and a low resistance value. SOLUTION: In this bolometer-type infrared detection element, having a light-receiving part supported by bridge parts on a silicon substrate, the light- receiving part includes a wiring layer formed so as to extend through the bridge parts to the light-receiving part, electrode parts electrically connected to the wiring layer, and the bolometer layer formed over the electrode parts. The bolometer layer comprises a layer, composed mainly of a prescribed NTC(negative temperature coefficient) thermistor material.
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