SEMICONDUCTOR OPTICAL WAVEGUIDE DEVICE

摘要

A semiconductor optical waveguide device comprises a semiconductor rib waveguide comprising an elongate rib portion and slab regions on immediately adjacent opposite lateral sides of the rib portion, the rib portion extending above the slab regions, at least one of the slab regions including a recess spaced apart from the rib portion, an un-doped lateral wall of the recess providing a lateral boundary (referred to herein as "the recess lateral wall boundary") of the rib waveguide such that in use it laterally confines an optical wave propagated by the waveguide. One or more doped regions may be situated adjacent to the waveguide.